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WP4: Smart microsystems

wp3:#3Z-scanner with glass ball microlens #4 Micro-assembly station Active (piezo-actuated) micro-gripper

Microsystems, components and technology integration

WP4 manager: Chrisophe GORECKI, FEMTO-ST

Co-manager: Laurent MARKEY, ICB

Key scientists : Alain DEREUX, Nicolas PASSILLY 



Next generation of multifunctional smart micro-nano systems requires original ways to build elementary blocks, to connect them and to integrate them in structures, thus providing intelligent functionalities by combining micromechanical components with distributed sensors, actuators and control on a single chip. 

Heterogeneous integration addresses the “value chain” for more efficient manufacturing of complete smart systems, combining the silicon micromachining, microfluidics & photonic technologies as well as efficient packaging, and micro-nanoassembly of micro-nanoscale blocks. Such components will also be integrated in distributed structures and metacomposites.

Nanostructuration methods will allow creating nanoscale building blocks with controlled size, shape, structure, and morphology, providing nanostructured thin films and devices with new tunable / reconfigurable functionalities (for instance the work in progress includes: polarisation control, nano-antennas, nano-resonators, plasmon detection, nano-actuators, optical fibres in smart structures, metamaterials systems).

The assembled components combine the unique feature of each technology into an efficient system, able to extract information from the environment, to process it electronically or opto-electronically, to exchange signals or data with a processing unit, and finally to provide relevant feedback signal to control the environment.


Main deliverables:
  • 2 years: First prototypes of plasmonic nanosensors for gas detection (nonlinear properties of metal nanostructures will be exploited).

  • 5 years: Integrated micro-optical coherent tomograph.

  • 7 years: Smart building blocks for integration in metacomposites


Socio-economic impact:
  • Sensor/actuator systems for automation in industry, or information processing functions;
  • Distributed actuators systems manufacturable at low-cost for new adaptive functions (active noise cancellation, ultrasonic transducers with focus control, adaptive optics, aerodynamic control, etc.);
  • Implantable biomedical systems such as ultra-integrated confocal microscopes or OCT systems.


Keywords: Nanosensors, MOEMS, Micro/nanofabrication, Microassembly, Distributed MEMS, resonant MEMS, Bio-MEMS, Energy harvesting, Environmental sensors, Wireless SAW sensors, femtosecond laser micro/nano machining, 3D micromachining & Robotic micro-assembly, Optical MEMS & microoptical devices, Biochips / Biosensors...